10/16
Evaluation
c. Narrow line width (1-layer, only one min. value from those two
lines) under CCD (1.5%)
Measure its width.
Narrowest Width (1.5%)
Worst (0.5%)
Others (1%)
d. Straight edges (x-direction) of the 1-layer lines under 100x OM
(1.5%) Calculatelinestraightnessonfouredgesforc.
Smallest line standard deviations (STDEV) (1.5%)
Worst (0.5%)
Others (1%)
100x OM

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