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Evaluation
e. Narrow line width (3-layer) (2%)
Measure its width under CCD.
Narrowest Width (2%)
Worst (1%)
Others (1.5%)
f. Straight edges (x-direction) of the 3-layer lines under 100x OM
(3%) Calculatelinestraightnessontwoedgesford.
Smallest sum line standard deviations (STDEV) (3%)
Worst (1%)
Others(2%)
100x OM

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