07/16
Report (Image resolution 4608x3072)
G. One picture (CCD) showing the narrowest line width from the
3-layer line and its value (e).
H. One picture (100x OM, the same section as CCD) of the 3-
layer line and its straightness on both sides of (f).
I. One picture (100x OM) showing the narrowest space between
the two 1-layer lines and its value (g).
J. During project, how did you try to improve patterns for better
results (n)?
K. What could be the reason for the better results (n)?

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