Introductory
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CVD (Chemical vapor deposition) ­ Cons
·Chemical handling,
·Some gas or vapor are toxic and are hardly detectable
by human sense.
·Environmental contamination,
·Exhaustion (gas, vapor, byproduct) can be harmful if
not correctly handled.
·Low variation of plasma application,
·Plasma treatment is sometimes a key process. CVD,
without plasma or ion bombardment, cannot be used
for these purposes.

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