Introductory
15/31
Spin-on (Sol-Gel) ­ Characteristic
·Extremely low cost for equipment but sometimes
consumable material's cost is high.
·Difficult to obtain a suitable condition for uniform thin film.
·Extremely easy handling equipment but sometimes
consumable material is environment-sensitive.
·Photo resist,
·UV resin,
·Low-temp. curing sol-gel.
Basic spin coater

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