Introductory
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·How to define a thin film?!
·Typically in micrometer (micron) and sub-micron range of
its thickness.
·How to form a thin film (examples in semi. industry)?!
·Deposition
·PVD (physical vapor deposition)
·Sputter, Molecular Beam Epitaxy (MBE),
Evaporator, Atomic Layer Deposition (ALD), ...
·CVD (chemical vapor deposition)
·LPCVD, PECVD, MOCVD, ...
·Spin-on
·Sol-Gel material or solution
·Thermal growth

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