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Mechanics of TFT on Polymer
Mechanics ­ Case study (mask overlay)
5W
12W
25W
· First (bottom gate) and second ((top) S/D) masks.
· Deposition condition between two masks
·150 °C, 300nm SiN ,
x
·150 °C, 200nm intrinsic a-Si,
·150 °C, 50nm n+ a-Si
·Cr for S/D contact.

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