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Reliability
Triple Layer Structure
·Mostly, the thickness and Young's modulus of films (TFTs,
ITOs, ...) are fixed due to their optimum electrical, optical,
and chemical properties/functionalities.
·Mostly, the substrate is also fixed for cost/property.
·The only possibility for stress modification lies in the
buffer layer (E , t ).
b
b
·The use of a buffer layer with low Young's modulus
enables the reduction of stress in film.

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