14/28
TFT on Silicon
Low Temperature Dielectric: Successful SiO example
x
·Different diluent gases (He, N , or Ar) mixed with silane
2
and ammonia showed compatible quality of thermal SiO :
x
Reference:
n=1.46-1.47
=4.1-4.2 (@1MHz)
for thermally grown SiO .
2

---