15/28
TFT on Silicon
Low Temperature TFT Device: General considerations
·The following goals have to be achieved in order to obtain
reliable TFT for flexible applications:
·Maximum deposition temperature should not exceed
the thermal budget of plastic substrate
PET: ~80 °C,
PEN: ~150 °C
PES: ~220 °C
PI: ~300-500 °C
·TFT should be compatible with existing manufacturing
process and tools.

---