03/31
Mechanics of TFT on Polymer
Deformation
·Even when TFT is designed to be flat, it experiences
stress at many steps during manufacturing and use.
·Built-in stress originates in TFT films that are grown with
non-equilibrium inorganic (Si, N, O, ...) atoms that seek to
move to low-energy positions.
·Thermal and humidity stresses are caused by differences
in CTE and CHE (CME) between film and substrate or
between films.

---