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Mechanics of TFT on Polymer
Mechanics
·The mismatch causes the substrate to bend, results in a
bending radius r.
·Example: Si on glass (E / E 1), r follows Stoney
f
s
equation.
-
·Example: Si on plastic (E / E 100), complete equation
f
s
is needed. Stoney equation is only OK when t / t < 10-3.
f
s

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