v. 2016/3/8
In the PROPERTIES window, assign the SUBSTRATE = SiO2, THICKNESS = 1
mm, FRONT MEDIUM = VOID (default), and BACK MEDIUM = VOID
(default).
a. Set REFERENCE WAVELENGTH = 550 nm (default), simulation
WAVELENGTHS range = 300-800 nm, and RESOLUTION = 1nm.
b. Keep GRADED-INDEX LAYER default (STEP SPACING = 0.01 and
SUBLAYER MINIMUM OPTICALTHICKNESS = 0 nm).
c. Keep COLOR default (ILLUMINANT = CIE-D65 and OBSERVER =
CIE-1931).
d. Keep
ANALYSIS
default
(CONSIDER
BACKSIDE
=
YES,
ELLIPSOMETER = RAE, and DELTA MIN = -90 degrees).
e. Keep
MONITORING
default
(CONSIDER
BACKSIDE
=
YES,
ELLIPSOMETER = RAE, DELTA MIN = -90 degrees, and SUBLAYER
THICKNESS = 1 nm).
13. Modify your filter from FILTERADD LAYER, the SIMPLE LAYER window
appears.
a. Input your layer material and its thickness. For example, MATERIAL = PITO,