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M Stach et al
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[8] Itani T et al 2002 Effect of high numerical aperture lens on
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[9] Hwang D H and Cheng W H 2004 Patterning strategy for
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the resolution of a conventional exposure system without
technology to fabricate optical elements: process
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simulation, fabrication, and measurement J. Vac. Sci.
works by straining the structure on a polymer substrate. The
Technol. B 30 031605
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exposure system with a LIL setup under strain was improved
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from 210 to 190 nm (-9.5%) and from 180 to 75 nm (-58%),
Phys. 105 094902
respectively. This study also shows that applying different
[13] Kumar R R, Rao K N and Phani A R 2012 Growth of silicon
nanowires by electron beam evaporation using indium
strains can produce a tunable WGP capable of reversible
catalyst Mater. Lett. 66 110­2
operations with an extinction ratio between 2.3 and 4.2 dB
[14] Zhang J, Shokouhi B and Cui B 2012 Tilted nanostructure
(+83%). This study uses both simulation and experimental
fabrication by electron beam lithography J. Vac. Sci.
evidence to show that the ER changed because of the CR
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and the delamination fragments. The complete simulation
[15] Jeon K J, Lee J M, Lee E and Lee W 2009 Individual Pd
model considers the influence of the strain and, the influence
nanowire hydrogen sensors fabricated by electron-beam
lithography Nanotechnology 20 135502
of the CR. Determining an operation window before the
[16] Moon M W, Han J H, Vaziri A, Her E K, Oh K H,
optimized strain provides raising the ER without generating
Lee K R and Hutchinson J W 2009 Nanoscale ripples on
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polymers created by a focused ion beam Nanotechnology
can be further improved with the appropriate selection of
20 115301
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[17] Bell C et al 2003 Fabrication of nanoscale heterostructure
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Acknowledgments
[18] Wen Y H, Zhang Y and Zhu Z Z 2007 Size-dependent effects
on equilibrium stress and strain in nickel nanowires Phys.
This study was partially supported by the National
Rev. B 76 125423
Science Council (ID NSC101-2221-E-007-054-MY2) and the
[19] Taraci J L et al 2005 Strain mapping in nanowires
`Toward World-Class University Project' of National Tsing
Nanotechnology 16 2365
Hua University. The authors want to thank Drs Meng-Kao
[20] Olliges S et al 2008 In situ observation of cracks in gold
nano-interconnects on flexible substrates Scr. Mater. 58 175
Yeh, Rongshun Chen, Cheng-Huan Chen, Chien-Chung
[21] Lu N, Wang X, Suo Z and Vlassak J J 2007 Metal films on
Fu and their teams for valuable technical discussion and
polymer substrates stretched beyond 50% Appl. Phys. Lett.
administrative support. The authors also appreciate Dr
91 221909
Michael H Huang's spectrophotometer-related consultation.
[22] Xiang Y, Li T, Suo Z and Vlassak J J 2005 High ductility of a
metal film adherent on a polymer substrate Appl. Phys. Lett.
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