Nanotechnology 24 (2013) 115306
M Stach et al
[30] Moonen P F, Yakimets I and Huskens J 2012 Fabrication of
ratio and submicron lateral dimensional changes of
transistors on flexible substrates: from mass-printing to
ultrathin polymeric films Rev. Sci. Instrum. 73 1813­20
high-resolution alternative lithography strategies Adv.
[33] Chen C, Pang L, Tsai C, Levy U and Fainman Y 2005
Mater.
24 5526­41
Compact and integrated TM-pass waveguide polarizer Opt.
[31] Huang Y R, Kuo S A, Stach M, Liu C H, Liao K H and
Express
13 5347­52
[34] Wathuthanthri I, Mao W and Choi C 2011 Two
Lo C Y 2012 A high sensitivity three-dimensional-shape
degrees-of-freedom Lloyd-mirror interferometer for
sensing patch prepared by lithography and inkjet printing
superior pattern coverage area Opt. Lett.
36 1593­5
Sensors
12 4172­86
[35] Ammann E and Massey G 1968 Modified forms for
[32] Ma T, Bhushan B, Murooka H, Kobayashi I and
Glan-Thompson and Rochon prisms J. Opt. Soc. Am.
Osawa T 2002 A novel technique to measure the Poisson's
58 1427­31
7