PME5232
Spanning
Frontiers in Micro/Nano System Engineering and
Molecular Diagnosis
(Spring 2004)
Handouts
l Handout #1 (02/18)
l Handout #2- Lecture notes (02/18) – Introduction
l Handout #3- Lecture notes (02/25) – Introduction to MEMS and Nanotech
l Handout #4- Lecture notes (03/17) – Micro/Nano Fabrication Technology
l Handout #5- Lecture notes (04/14) – Micro/Nano ElectroMechanical Systems for Bio-applications