PME5230
Micro-Electro-Mechanical
Transducers
(Autumn 2004)
Handouts
l Handout #1 (09/15)
l Handout #2 - Richard P. Feynman Seminar Paper – “There’s Plenty of Room at the Bottom”(09/15)
l Handout #3 - Kurt Petersen “Silicon as a Mechanical Material” (09/15)
l Handout #4- Lecture notes (09/15) – Introduction
l Handout #5- Lecture notes (09/15) – MEMS past, present and future
l Handout #6- Lecture notes (09/29) – Transducers and Scaling
l Handout #7- Lecture notes (10/06) – Micro/Nano Machining (I)
l Handout #8- Lecture notes (10/06) – Micro/Nano Machining (II)
l Handout #9- Lecture notes (10/06) – Micro/Nano Machining (III)
l Handout #10- Lecture notes (10/06) – Mechanical Transducers_Piezoresistive
l Handout #11- Lecture notes (12/08) – Mechanical Transducers_Piezoelectrical
l Handout #12- Lecture notes (12/08) – Mechanical Transducers_Capacitive
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Handout #13- Lecture notes (11/17)
– Nano Opens
l Handout #14- Lecture notes (12/08) – Optics Joined with Silicon (hardcopy available on class only)
l Handout #15- Lecture notes (12/15) – Optical MEMS_1
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