PME5230
Micro-Electro-Mechanical Transducers

(Autumn 2004)

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Handouts

l          Handout #1 (09/15)

l          Handout #2 - Richard P. Feynman Seminar Paper – “There’s Plenty of Room at the Bottom”(09/15)

l          Handout #3 - Kurt Petersen “Silicon as a Mechanical Material” (09/15)

l          Handout #4- Lecture notes (09/15) – Introduction

l          Handout #5- Lecture notes (09/15) – MEMS past, present and future

l          Handout #6- Lecture notes (09/29) – Transducers and Scaling

l          Handout #7- Lecture notes (10/06) – Micro/Nano Machining (I)

l          Handout #8- Lecture notes (10/06) – Micro/Nano Machining (II)

l          Handout #9- Lecture notes (10/06) – Micro/Nano Machining (III)

l          Handout #10- Lecture notes (10/06) – Mechanical Transducers_Piezoresistive

l          Handout #11- Lecture notes (12/08) – Mechanical Transducers_Piezoelectrical

l          Handout #12- Lecture notes (12/08) – Mechanical Transducers_Capacitive

l          Handout #13- Lecture notes (11/17) – Nano Opens New World for Sensors (hardcopy available on class only)

l          Handout #14- Lecture notes (12/08) – Optics Joined with Silicon (hardcopy available on class only)

l          Handout #15- Lecture notes (12/15) – Optical MEMS_1

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