PME5230
Sensing and Actuation in Miniaturized Systems

(Autumn 2021)

Handouts

l Handout #1 - ¡§Optical MEMS: From Micromirrors to Complex Systems¡¨ by Olav Solgaard ; Asif A. Godil ; Roger T. Howe ; Luke P. Lee ; Yves-Alain Peter ; Hans Zappe

l Handout #2- ¡§Blood on a Chip¡¨ Mehmet Toner and Daniel Irimia at Harvard

l Handout #3- Lecture notes (09/13) ¡V Introduction/ Exploring Sensing and Actuation in Miniaturized Systems/Scaling

l Handout #4- Lecture notes (09/13) ¡V Micro/Nano Fabrication Techniques

l Handout #5- Lecture notes (10/04)¡V Mechanical Transducers-I

l Handout #6- Lecture notes (10/18)¡V Mechanical Transducers-II

l Handout #7- Lecture notes (10/25)¡V Mechanical Transducers-III

l Handout #8- Lecture notes (11/15) ¡V MicroSystems Tech. History (the Past, Present and Future) and Microfluidic Systems/ BioMEMS/ MEMS related NanoBio Tech. (I)

l Handout #9- Lecture notes (11/22) ¡VMicrofluidic Systems/ BioMEMS/ MEMS related NanoBio Tech. II & III

l Handout #10- Lecture notes (12/11) ¡VMicrofluidic Systems/ BioMEMS/ MEMS related NanoBio Tech. IV