PME5230
Sensing and Actuation in Miniaturized Systems

(Autumn 2021)

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Handouts

l   Handout #1 - “Optical MEMS: From Micromirrors to Complex Systems” by Olav Solgaard ; Asif A. Godil ; Roger T. Howe ; Luke P. Lee ; Yves-Alain Peter ; Hans Zappe

l   Handout #2- “Blood on a Chip” Mehmet Toner and Daniel Irimia at Harvard

l   Handout #3- Lecture notes (09/13) – Introduction/ Exploring Sensing and Actuation in Miniaturized Systems/Scaling

l   Handout #4- Lecture notes (09/13) – Micro/Nano Fabrication Techniques

l   Handout #5- Lecture notes (10/04)– Mechanical Transducers-I

l   Handout #6- Lecture notes (10/18)– Mechanical Transducers-II

l   Handout #7- Lecture notes (10/25)– Mechanical Transducers-III

l   Handout #8- Lecture notes (11/15) – MicroSystems Tech. History (the Past, Present and Future) and Microfluidic Systems/ BioMEMS/ MEMS related NanoBio Tech. (I)

l   Handout #9- Lecture notes (11/22) –Microfluidic Systems/ BioMEMS/ MEMS related NanoBio Tech. II & III

l   Handout #10- Lecture notes (12/11) –Microfluidic Systems/ BioMEMS/ MEMS related NanoBio Tech. IV