For sample fabrication:

 

Electron-beam lithography system (ready)
HV E-beam evaporation system (ready)
Atomic layer deposition (ready)
Pulsed laser deposition system (ready)
Magnetic field annealing system (ready)
Metal etcher (ready)
Chemical Vapor Deposition for SiO2 or SiN (ready)
Oxidation furnace for SiO2 (ready)
HV sputtering system (ready)
UHV sputtering system (ready next month)

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Equipments for measurements:

 

Scanning electron microscope (ready)
Atomic Force Microscope/Magnetic Force Microscope/Conductive Atomic Force Microscope (ready)
Magnetoresistance measurement system (ready)
Ferromagnetic resonance measurement system (ready)
50GHz S-parameter measuring system (ready)
Vibrating sample magnetometry (ready)
MOKE system (ready)
NanoMOKE system (under construction)
Low temperature system from room temperature down to 2.8 K (ready next month)

 

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Bio-related equipments:

 

Equipments for biological cell culture (ready)
Surface plasmon resonance (under construction)

Laminar Flow Work Station / Biological Safety Cabinet

High Speed Centrifuge

Cell Culture CO2 Incubator