Instructor: Liu,
Cheng-Hsien chhsliu@mx.nthu.edu.tw
Office: Room 517, Engineering
Building #1
Phone: (03) 5715131 ext.3706
Office
hours:
by appt.
TA: Hsin-Yu Wu watee520@yahoo.com.tw
Office
hours:
by
appt.
Kuang-Han Chu g916202@oz.nthu.edu.tw
Office
hours:
by
appt.
Lectures: Time Tuesday
2:10pm-4:50pm
Location Room 430,
Engineering Building #1, National Tsing Hua University
(Courses will be at National Center for
High-Performance Computing on 03/04, 03/11, 03/18, 04/01, 04/29)
Course Web site: http://mx.nthu.edu.tw/~chhsliu/MEMS/PME5231_Liu.html
The Goal of the course is
to provide graduate students with the capability on the design and analysis of
Micro-Electro-Mechanical Systems, which use integrated circuit fabrication for
their realization. MEMS has
applications like mechanical sensors, optical sensors, chemical sensors,
projection displays, fiber switches, DNA amplification, medical diagnostics,
lab-on-a-chip, microrobots, and many others.
The field has become so diverse that it really is not a field
anymore. One of the challenges for MEMS
is the complexity of MEMS design. Even
simple MEMS devices manipulate energy or information in several energy domains. The designer must understand, and find ways
to control, complex interactions between these domains. Yet another complicating factor is that
parallel processing does not lend itself to step-by-step optimization of a
design. We can not whittle away a
device till it fits. All of these lead
the analysis to another challenge in MEMS developments. This course will focus on the design and
analysis of MEMS and train students to get familiar with commercial MEMS
software.
§
Recommended
References:
-
Gregory Kovacs, "Micromachined Transducers Sourcebook," McGraw-Hill,
1998
- MEMS Design class notes from Professor Olav Solgaard, Stanford University, 2002
Course Topics (
Tentative )
Topics |
Readings |
Hours |
Introduction
to MEMS design, Micromaching fundamentals and State-of-the-art MEMS proceses |
Chapter 1- to 4 |
6 |
Handouts #7 and #8 |
3 |
|
Handouts #9~#12 |
12 |
|
Finite
Element Analysis (B.C.’s and mesh) |
Class notes |
3 |
Case Study |
Handouts #13 |
3 |
Micro-transducers |
Chapter 6 and Handouts #14 |
3 |
System
Dynamic Simulation using Simulink |
Handouts #15 |
3 |
Simulink
Examples |
Handouts #16 and 17 |
3 |
Microdynamics |
Chapter 5, 7, 15 and Handouts #18, 19 |
3 |
Nonlearity
and Linear Model |
Handouts #20 |
3 |
|
|
|
|
|
|
Links
to Other Sites
Matlab Tutorial
Matlab Primer
Matlab/Simulink
links: http://math.uc.edu/~kingjt/matlab_lnk.html
http://physics.gac.edu/~huber/matlab/
http://www.eng.fsu.edu/~cockburn/matlab/matlab_help.html
http://www.engr.umd.edu/~nsw/ench250/matlab.htm
http://www.ece.wpi.edu/courses/es3011/sim/simulink.html
http://www.messiah.edu/acdept/depthome/engineer/Resources/tutorial/matlab/simu.html
http://www.rpi.edu/dept/chem-eng/WWW/faculty/bequette/lou/simtut/simtut_html.html
http://wolfman.eos.uoguelph.ca/~jzelek/matlab/ctms/
Last
updated: Feb. 11, 2003 by Cheng-Hsien Liu