`PME5231 MEMS Design and Analysis`
`(Spring 2003)`

`Course Information`

Instructor:     Liu, Cheng-Hsien          chhsliu@mx.nthu.edu.tw
            Office:                          Room 517, Engineering Building #1
            Phone:                          (03) 5715131 ext.3706
            Office hours:                by appt.

TA: Hsin-Yu Wu watee520@yahoo.com.tw
Office hours: by appt.

Kuang-Han Chu g916202@oz.nthu.edu.tw
Office hours: by appt.

Lectures: Time Tuesday 2:10pm-4:50pm
Location Room 430, Engineering Building #1, National Tsing Hua University

(Courses will be at National Center for High-Performance Computing on 03/04, 03/11, 03/18, 04/01, 04/29)

Course Web site: http://mx.nthu.edu.tw/~chhsliu/MEMS/PME5231_Liu.html

`Course Objectives`

The Goal of the course is to provide graduate students with the capability on the design and analysis of Micro-Electro-Mechanical Systems, which use integrated circuit fabrication for their realization. MEMS has applications like mechanical sensors, optical sensors, chemical sensors, projection displays, fiber switches, DNA amplification, medical diagnostics, lab-on-a-chip, microrobots, and many others. The field has become so diverse that it really is not a field anymore. One of the challenges for MEMS is the complexity of MEMS design. Even simple MEMS devices manipulate energy or information in several energy domains. The designer must understand, and find ways to control, complex interactions between these domains. Yet another complicating factor is that parallel processing does not lend itself to step-by-step optimization of a design. We can not whittle away a device till it fits. All of these lead the analysis to another challenge in MEMS developments. This course will focus on the design and analysis of MEMS and train students to get familiar with commercial MEMS software.

`General Info`

Textbook:

Senturia, " Microsystem Design," Kluwer, 2001
My class notes.

§ Recommended References:

- Gregory Kovacs, "Micromachined Transducers Sourcebook," McGraw-Hill, 1998

- MEMS Design class notes from Professor Olav Solgaard, Stanford University, 2002

Prerequisites:

Well, none.

Grading:

Problem Sets (no late submission) and Midterm Presentations: 60%
Projects and Oral Presentations : 40%

Announcements

Course Topics ( Tentative )

`Topics`	`Readings`	`Hours`
`Introduction to MEMS design, Micromaching fundamentals and State-of-the-art MEMS proceses`	`Chapter 1- to 4`	`6`
`CAD for MEMS Design and Analysis`	`Handouts #7 and #8`	`3`
`LEDIT Layout /MEMCAD/MUMPS`	`Handouts #9~#12`	`12`
`Finite Element Analysis (B.C.’s and mesh)`	`Class notes`	`3`
`Case Study`	`Handouts #13`	`3`
`Micro-transducers`	`Chapter 6 and Handouts #14`	`3`
`System Dynamic Simulation using Simulink`	`Handouts #15`	`3`
`Simulink Examples`	`Handouts #16 and 17`	`3`
`Microdynamics`	`Chapter 5, 7, 15 and Handouts #18, 19`	`3`
`Nonlearity and Linear Model`	`Handouts #20`	`3`