Micro-Electro-Mechanical Transducers

(Autumn 2004)


Course Information

Instructor: Liu, Cheng-Hsien
Office: Room 517, Engineering Building #1
Phone: (03) 5715131 ext.3706
Office hours: made by appt.

TA: Chih-Ming Cheng
Shih-Chi Chan
Office hours: made by appt.

Lectures: Time Wednesday 2:10pm-4:50am
Location Room 217, Engineering Building #1

Course Web site:   


Course Objectives

The Goal of the course is to provide senior and graduate students with the basic concepts and principles of Micro-Electro-Mechanical Transducers, which use integrated circuit fabrication for their realization. Categories of sensors and actuators include biological, chemical, mechanical, optical, thermal, etc. Basic mechanism of transduction, microfabrication techniques, and relative merits of the different technologies will be addressed. This course will be research oriented and focuses on paper survey.


General Info

    • Textbook:
      • Gregory Kovacs, "Micromachined Transducers Sourcebook," McGraw-Hill, 1998
      • My class notes.

         Recommended References:

         AIP Handbook of Modern Sensors by Jacob Fraden

         Semiconductor sensors by M. Sze, 1994

         Mac Madau, " Fundamnetals of Microfabrication" CRC press 1998.

         And quite a few other MEMS related books, journal papers, conference proceeding

    • Prerequisites:
      • Well, none.
    • Grading:
      • Problem Sets (web submission and no late submission):  50%
      • Class discussion and attendance 15%
      • Final Project and Oral Presentations :  35%
      • Extra 5% is reserved for your class discussion and performance




Course Topics



Introduction and Overview to Micro-Transducers and Micro-Systems

Ch 1

Micromachining Processes

Ch 2

Mechanical Transducers

Ch 3

Optical Transducers

Ch 4

Chemical Transducers

Biological Transducers

Microfluidic Devices

Ch 8 and Ch 9

Literature survey



Real-time Class Evaluation/Review

We will use English to communicate during this course. My lectures, discussion, and your presentation will be in English. Thus, your real-time response is highly appreciated to improve the quality of this course. When you feel very hard to catch my lectures or have some suggestion to improve this class, please fill the form and mail it to me. I will try to resolve possible learning difficulty.





All your homework needs to be submitted via web and due by noon of the due day. (or the time when TA checks your homework on web. You might take chance.) It is your responsibility to regularly check your homework web page and make sure TA and myself can get access to your homework address.


Homework Solution Link


Final Projects


Links to Other Sites

MEMS Clearinghouse

MEMS Interchange

Semiconductor Subway

Stanford MEMS Facility    


Last updated: Sep. 2, 2004 by Cheng-Hsien Liu