`PME5230`
Sensing and Actuation in Miniaturized Systems

`(Autumn` `2010)`

`Course Information`

Instructor:        Liu, Cheng-Hsien           liuch@pme.nthu.edu.tw
Office:               Room 517, Engineering Building #1
Phone:             (03) 5715131 ext.33706

Lectures: Time Tuesday 2:10pm-4:50am
Location Room 213, Engineering Building #1

Office Hours: Tuesday 10:10pm-11:50am

Course Web site: http://mx.nthu.edu.tw/~chhsliu/transducer_new/PME5230_Liu.html　

`Course Objectives`

The Goal of the course is to provide senior and graduate students with the basic concepts and principles of sensing and actuation in miniaturized systems, which mostly use integrated circuit fabrication for their realization. Categories of sensors and actuators include biological, chemical, mechanical, etc. Basic mechanism of transduction, micro/nanofabrication techniques, and relative merits of the different technologies will be addressed. This course will be research oriented and focuses on paper survey.

`General Info`

Textbook/ Required Class material:

My class notes (either handouts or on web downloadable files)
Proceedings of Transducers 09
Proceedings of MicroTAS 2009
Proceedings of IEEE MEMS 2010

Recommended References:

Gregory Kovacs, "Micromachined Transducers Sourcebook," McGraw-Hill, 1998 (highly recommended)
“Microsystems Design” by Stephen Senturia (ISBN 0-7923-7246-8)

§ “Fundamentals of BioMEMS and Medical Microdevices” by Steven Saliterman (ISBN 0-8194-5977-1)

§ AIP Handbook of Modern Sensors by Jacob Fraden

§ Semiconductor sensors by M. Sze, 1994

§ Mac Madau, " Fundamnetals of Microfabrication" CRC press 1998.

And quite a few other MEMS related books, journal papers, conference proceeding

Prerequisites:

This course will be given in English for this semester. Class presentation will be also requested in English. You need to learn how to set up a web linkable to your presentation files.

Grading:

Class Presentation and Discussionincluding Class attendance: 30+5%
Idea Exploring Competition : 20%
Class FinalOral Presentations : 35%
Extra 10% is reserved for your class discussion and performance

Course Topics (tentative)

`Topics`	Lecture Schedule
Course Overview and Exploring Sensing and Actuation in Miniaturized Systems/Scaling	Sep. 14
Introduction to Micro/Nano Transducers and Microsystem Technology and MEMS History	Sep. 21, Oct. 5
	Sep. 28 (no Lecture due to holiday break)
Micro/Nano Fabrication Techniques (Idea Exploring Competition)	Oct. 5, Oct. 12
Miniaturized Mechanical Transducers and Microsystem Applications (I)	Oct. 19
Miniaturized Mechanical Transducers and Microsystem Applications (II)	Oct. 26
Class Presentations and Discussions (I)	Nov. 2
Special Topics by Guess Speaker (Prof. Sheng-Shian Li from Institute od NEMS/ Topics : RF MEMS)	Nov. 9
Class Presentations and Discussions (II)	Nov. 16
Microfluidic Systems, BioMEMS and MEMS related NanoBio Tech. (I)	Nov. 23, Nov. 30
Microfluidic Systems, BioMEMS and MEMS related NanoBio Tech. (II)	`Nov.` `30, Dec. 7`
Idea Exploring Competition (Final Project)(Due on noon of Nov. 30)	`Dec. 14`
Microfluidic Systems, BioMEMS and MEMS related NanoBio Tech. (III)	`Dec. 21`
Class Final Presentations (II)	`Dec.28`
Class Final Presentations (III)	`Jan.4`