NTHU

`PME5230` Sensing and Actuation in Miniaturized Systems `(Autumn` `2025)`

`Course Information`

Instructor: Liu, Cheng-Hsien liuch@pme.nthu.edu.tw
Office: Room 517, Engineering Building #1
Phone: (03) 5742496

Lectures: Time Thursday 1:20pm-4:10 (~150 minutes/week, one or two breaks in each-week class)
Location Room 101, Engineering Building #1

(Lecture given in English)

Office Hours: Monday 3:30pm~4:30pm and appointment by email

Course Web site: http://mx.nthu.edu.tw/~chhsliu/transducer_new/PME5230_Liu.html

`Course Objectives`

The Goal of the course is to provide senior and graduate students with the basic concepts and principles of sensing and actuation in miniaturized systems, which mostly use integrated circuit fabrication for their realization. Categories include sensors/ actuators (named Transducers), microfluidics and Lab on Chip, etc. Basic mechanism of transduction, micro/nanofabrication techniques, and relative merits of the different technologies will be addressed. This course will be research oriented and focuses on conference/journal paper survey.

`General Info`

Textbook/ Required Class material:

My class notes (on-linedownloadable filesthrough your eeclass account)
The Popular Documents (the 50 most frequently accessed documents) in Journal of Microelectromechanical Systems (https://ieeexplore.ieee.org/xpl/topAccessedArticles.jsp?punumber=84)
Lab on Chip journal paper published March 2023~ Feb. 2024 (http://www.rsc.org/journals-books-databases/about-journals/lab-on-a-chip/)
Sensors and Actuators B: Chemical Journal paperspublished March 2023~ Feb. 2024 (https://www.sciencedirect.com/journal/sensors-and-actuators-b-chemical)

Recommended References (all recommended books have been reserved and available at Main Library):

Gregory Kovacs, "Micromachined Transducers Sourcebook," McGraw-Hill, 1998
“Microsystems Design” by Stephen Senturia (ISBN 0-7923-7246-8)

§ “Fundamentals of BioMEMS and Medical Microdevices” by Steven Saliterman (ISBN 0-8194-5977-1)

§ Microfluidic Cell Culture Systems (Micro and Nano Technologies) 1st Edition by Christopher Bettinger, Jeffrey T Borenstein, Sarah L Tao (ISBN-13: 978-1437734591 / ISBN-10: 1437734596)

And quite a few other MEMS related books, journal papers, conference proceeding

Prerequisites:

Discussed during first class

Grading:

1^st Class Presentation: 30%
Idea Exploring Competition : 25%
Class FinalOral Presentations : 40%
Discussion-including Class attendance,discussion and performance: 5~10%

Course Topics (tentative)

`Topics`	Lecture Schedule
Course Overview/ Exploring Sensing and Actuation in Miniaturized Systems/Scaling	Sep. 4
Miniaturized Mechanical Transducers and Microsystem Applications (I)	Sep. 11
You are encouraged (optional) to attend NEMS Institute seminar on either 09/18, 11/10 or 11/17 (3:20pm at Room 108, Engineering Building #1)	No lecture on 09/18
Miniaturized Mechanical Transducers and Microsystem Applications (II)	Sep. 25
Miniaturized Mechanical Transducers and Microsystem Applications (III)	Oct. 2
MicroSystems Tech. History and Microfluidic Systems/ BioMEMS/ MEMS related NanoBio Tech. (I)	Oct. 9
MicroSystems Tech. History and Microfluidic Systems/ BioMEMS/ MEMS related NanoBio Tech. (II)	Oct. 16
1^st Class Presentations	`Oct. 16 & 23`
MicroSystems Tech. History and Microfluidic Systems/ BioMEMS/ MEMS related NanoBio Tech. (II)	Oct. 30
Idea Exploring Competition (Team Project)	`Nov. 6`
MicroSystems Tech. History and Microfluidic Systems/ BioMEMS/ MEMS related NanoBio Tech. (III) (or photonic MEMS)	`Nov. 13`
Micro/Nano Fabrication Techniques(I)	`Nov. 20`
Micro/Nano Fabrication Techniques(I)	`Nov. 27`
Class Final Presentations	`Dec. 4 & 11`