NTHU

PME5230  Sensing and Actuation in Miniaturized Systems (Autumn 2018)

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Course Information

Instructor:        Liu, Cheng-Hsien          liuch@pme.nthu.edu.tw
Office:  Room 517, Engineering Building #1
Phone:  (03) 5742496

Lectures:     Time          Monday 9:00am-11:50am
Location  Room 201, Engineering Building #1

Office Hours:  Friday 8:30am~9:30am & 11:00am~12:00 and appointment by email

Course Web site: http://mx.nthu.edu.tw/~chhsliu/transducer_new/PME5230_Liu.html

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Course Objectives

The Goal of the course is to provide senior and graduate students with the basic concepts and principles of sensing and actuation in miniaturized systems, which mostly use integrated circuit fabrication for their realization.  Categories of sensors and actuators include biological transducers, mechanical transducers, etc.  Basic mechanism of transduction, micro/nanofabrication techniques, and relative merits of the different technologies will be addressed.  This course will be research oriented and focuses on paper survey. 

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General Info

§  “Fundamentals of BioMEMS and Medical Microdevices” by Steven Saliterman (ISBN 0-8194-5977-1)

§  Microfluidic Cell Culture Systems (Micro and Nano Technologies) 1st Edition by Christopher Bettinger, Jeffrey T Borenstein, Sarah L Tao (ISBN-13:  978-1437734591 / ISBN-10:  1437734596)

§  AIP Handbook of Modern Sensors by Jacob Fraden

§  Semiconductor sensors by M. Sze, 1994

§  Mac Madau, " Fundamnetals of Microfabrication" CRC press 1998.

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Course Topics  (tentative)

Topics

Lecture Schedule

Course Overview/ Exploring Sensing and Actuation in Miniaturized Systems/Scaling

Sep. 10

Micro/Nano Fabrication Techniques

Sep. 17,  Oct. 1

Miniaturized Mechanical Transducers and Microsystem Applications (I) (Idea Exploring Competition _announcement)

Oct. 1,

Miniaturized Mechanical Transducers and Microsystem Applications (II)

Oct. 8

Miniaturized Mechanical Transducers and Microsystem Applications (III)

Oct. 15

1st Class Presentations

Oct. 22

Introduction to Micro/Nano Transducers and Microsystem Technology and MEMS History

Oct. 29

Microfluidic Systems, BioMEMS and MEMS related NanoBio Tech. (I)

Nov. 5

Microfluidic Systems, BioMEMS and MEMS related NanoBio Tech. (II)

Nov. 12

Idea Exploring Competition (Final Project)

Nov. 19

Microfluidic Systems, BioMEMS and MEMS related NanoBio Tech. (III)

Nov. 26

Microfluidic Systems, BioMEMS and MEMS related NanoBio Tech. (IV)

Dec. 3

Microfluidic Systems, BioMEMS and MEMS related NanoBio Tech. (V)

Dec. 10

Class Final Presentations  

Dec. 17, 24

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Handouts

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Class Presentation

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Class Presentation(past examples)- 2008 Autumn

Class Presentation(past examples)- 2009 Autumn

Class Presentation(past examples)- 2010 Autumn

Class Presentation(past examples)- 2012 Autumn

Class Presentation(past examples)- 2014 Spring

Class Presentation(past examples)- 2015 Spring

Class Presentation(past examples)- 2016 Spring

Class Presentation(past examples)- 2017 Spring

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Idea Exploring Competition

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Last updated: July. 23, 2018 by Cheng-Hsien Liu