Principal Investigator

傅建中(Chien-Chung, Fu)教授


PI portrait

個人經歷

  • 國立清華大學動力機械工程學系 (1990-1994)
  • 國立清華大學動力機械工程研究所 控制組 (1994-1996)
  • 工研院 微系統實驗室 約聘副研究員 (1997-1998)
  • 教育部 85年碩士後赴歐公費留學 (1998-2002)
  • 德國卡爾斯魯爾研究中心 微結構技術研究所 (FZK, IMT)
  • 工學博士 (1999-2003)
  • 德國卡爾斯魯爾研究中心 微結構技術研究所研究員 (FZK, IMT) (1999-2004)
  • 國立清華大學 微機電系統工程研究所/動力機械工程學系 助理教授(2004-2008)
  • 國立清華大學 奈米工程與微系統研究所/動力機械工程學系 副教授(2008-2013)
  • 國立清華大學 奈米工程與微系統研究所/動力機械工程學系 教授 (2013-迄今)

現職

國立清華大學奈米工程與微系統研究所/動力機械工程學系 教授 (2013-迄今)


聯絡資訊

辦公室:國立清華大學奈米工程與微系統研究所 台達館 315室

Tel:+886-3-5715131 ext.33996

Fax:+886-3-5745454


研究領域

  • LIGA 微奈米加工技術
  • (HARMST based on LIGA, UV_LIGA Processes)
  • 生醫微機電系統 (Bio-MEMS)
  • 光學微機電系統 (Optical MEMS)
  • 微流體系統 (Micro Fluidic Systems)

近五年內執行及申請中之研究計畫

計畫名稱 補助或委託機構
開發應用於CMOS Image Sensor上之3D微光學元件用雙光子3D積層製造系統(1/2)(107-2218-E-007-053-) 科技部
開發應用於CMOS Image Sensor上之3D微光學元件用雙光子3D積層製造系統(106-3114-E-007-010-) 科技部
具感知與互動型的雷射干涉微影系統之開發--邁向IOT與智能化(106-2221-E-007-016-MY3) 科技部
基於雙光子/多光子技術的3D微奈米結構加工系統之開發以及於生醫組織工程以及三維光子晶體之應用(3/3)(105-2218-E-007-003-) 科技部
基於雙光子/多光子技術的3D微奈米結構加工系統之開發以及於生醫組織工程以及三維光子晶體之應用(2/3)(104-2218-E-007-004-) 科技部
高效率(大於200lm/W)發光二極體關鍵材料與零組件之開發(2/2)(104-3113-E-009-002-CC2) 科技部
果蠅神經網路體計畫(2/4)(103-2633-B-007-001-) 科技部
基於雙光子/多光子技術的3D微奈米結構加工系統之開發以及於生醫組織工程以及三維光子晶體之應用(1/3)(103-2218-E-007-010-) 科技部
高效率(大於200lm/W)發光二極體關鍵材料與零組件之開發(1/2)(103-3113-E-009-001-CC2) 科技部
果蠅神經網路體計畫(1/4)(102-2633-B-007-001-) 科技部
多光束雷射干涉微影設備之設計與開發(102-2221-E-007-026-MY4) 科技部
高效率(大於200 lm/W)發光二極體光源模組開發(102-3113-P-009-007-CC2) 科技部
滾壓式奈米壓印技術於軟性電子與綠能建材之應用, -子計畫三:利用單模態光纖式雷射干涉微影系統與SU-8背後曝光技術製作多元尺度奈米壓印模具(101-2221-E-007-055-MY2) 科技部
滾壓式奈米壓印技術於綠能建材之應用-總計畫及子計畫四:連續式大面積奈微米壓印製造技術之研究(101-2221-E-007-056-MY2) 科技部
滾壓式奈米壓印技術於軟性電子與綠能建材之應用, -子計畫二:利用單模態光纖式雷射干涉微影系統與SU-8背後曝光技術製作多元尺度奈米壓印模具(100-2221-E-007-075-) 科技部
先進大面積奈米金屬結構偏光元件製程與設備研製-先進大面積奈米金屬結構偏光元件製程與設備研製(2/3)(99-2622-E-007-005-CC1) 科技部
創新之奈米操控/檢測平台應用於單分子膜蛋白動態研究-3D 奈/微米混合尺度結構應用於人工脂質雙層膜成膜穩定性與最佳化之研究(子計畫四)(3/3)(99-2627-M-007-004-) 科技部
新型 DNA 生物高分子材料開發及光電元件上的應用(III)(99-2221-E-007-083-) 科技部
台灣學術里程與科技前瞻計畫之萌芽計畫(轉換科學發現為產業技術)-高解析三維生物影像技術發展為潛力生技產業(98-3011-P-007-004-) 科技部
創新之奈米操控/檢測平台應用於單分子膜蛋白動態研究-3D 奈/微米混合尺度結構應用於人工脂質雙層膜成膜穩定性與最佳化之研究(子計畫四)(2/3)(98-2627-M-007-004-) 科技部
多元尺度奈微米大面積壓印技術於顯示器之應用-子計畫三:利用創新之次波長雷射干涉技術製作大面積超硬奈米壓印模具之研究與製程設備開發(97-2221-E-007-047-MY3) 科技部
新世代複合型導光板開發三年計畫 經濟部

學術著作

Journal Papers (*Corresponding Author)

 

Papers during Ph. D period:

[J.1] C. Fu*, Z. Rummler and W. K. Schomburg, “Magnetically Driven Micro Ball Valves Fabricated by Multilayer Adhesive Film Bonding”, Journal of Micromechanics and Microengineering 13, 2003, pp.96-102. (SCI IF=2.105)(First Author and Corresponding Author)(Times cited = 19 by far)

 

Papers during Assistant Professor Position in NTHU

[J.2] C Fu*, C Hung and H Huang , “A Novel and Simple Fabrication Method of Embedded SU-8 Micro Channels by Direct UV Lithography” J. Phys. 34, 2006, pp.330-335 (SCI IF=2.544)(First Author and Corresponding Author)(Times cited = 10 by far)

[J.3] C. Fu*, H. Huang, “Different Methods for the Fabrication of UV-LIGA Molds using SU-8 with Tapered De-molding Angles”, Microsystem Technologies 13, 2007, pp.293-298. (SCI IF=0.931)(First Author and Corresponding Author)(Times cited = 6 by far)

[J.4] H. Huang and C. Fu*, “Different Fabrication Methods of Out-of-Plane Polymer Hollow Needle Array and their Variations”, Journal of Micromechanics and Microengineering 17, 2007, pp.393–402 (SCI IF=2.105)(Corresponding Author)(Times cited = 14 by far)

[J.5] H. Huang, W. Yang, T. Wang and C. Fu*, “3D High Aspect Ratio Micro Structures Fabricated by One Step UV Lithography”, Journal of Micromechanics and Microengineering 17, 2007, pp.291-296. (SCI IF=2.105)(Corresponding Author)(Times cited = 9 by far)

[J.6] T. Liou, C. Chan, C. Fu and K. Shih, “Effects of Impact Inertia and Surface Characteristics on Deposited Polymer Droplets in Microcavities”, IEEE/ASME Journal of MEMS, Vol.17, No.2, 2008, pp.278-287.  (SCI IF=2.098)(Times cited = 5 by far)

[J.7] C. Ting, M. Huang, H. Tsai, C. Chou, C. Fu*, “Low Cost Fabrication of the Large-Area Anti-Reflection Films from Polymer by Nanoimprint/Hot-embossing Technology”, Nanotechnology Vol.19, 2008, pp. 205301. (SCI IF = 3.979) (Corresponding Author)(Times cited =32 by far)

 

Papers during Asssociate Professor Position in NTHU

[J.8] H. Chen, C. Fu*, “An Investigation into the Characteristics of Deep Reactive Ion Etching of Quartz using SU-8 as Mask”, Journal of Micromechanics and Microengineering 18, 2008, pp.105001-8. (SCI, IF=2.105) (Corresponding Author)

[J.9] T. Liu, S. Hsu, Y. Huang, S. Lin, T. Huang, T. Chuang, S. Fan, C. Fu, F. Tseng, R. Pan, “ The Proximity between C-termini of Dimeric Vacuolar H+-pyrophosphatase Determined using Atomic Force Microscopy and a Gold Nanoparticle Technique”  The FEBS Journal, Vol. 276, No. 16, 2009, pp. 4381-4394. (SCI, IF= 3.790)

[J.10] Y. Huang, T. Liu, Y. Chen, C. Lee, H. Chen, T. Huang, S. Hsu, S. Lin, Y. Pan, C. Lee, I. Hsu, F. Tseng, C. Fu, R. Pan, “Distance Variation between Active Sites of H+ -Pyrophosphatase Determined by Fluorescence Resoonance Energy Transfer”, Journal of Bioloigical Chemistry (JBC), Vol. 285, No. 31, pp. 23655–23664, 2010.  (SCI, IF = 4.773).

[J.11] S. Hsu, Y. Lo, J. Tung, Y. Ko, Y. Sun, C. Hung, C. Yang, F. Tseng, C. Fu and R. Pan, “Leptospiral Outer Membrane Lipoprotein LipL32 Binding on Toll-like Receptor 2 of Renal Cells As Determined with an Atomic Force Microscope”, Biochemistry Vol. 49, 2010, 5408–541. (SCI, IF=3.422)

[J.12] M. Huang, and C. Fu*, “Fabrication of Steel Roller Imprinting Molds through Adapting Conventional Planar Micro Fabrication Tools” Microsystem Technologies, Vol. 16, pp. 1845–1853 2010 (SCI, IF=0.931) (Corresponding Author)

[J.13] K. Pan, and C. Fu*, “A Fine Surface Roughness Electroless Ni–P–PTFE Composite Modified Stamper for Light Guide Plate Application”, Journal of Micromechanics and Microengineering, Vol. 20, pp-095020, 2010. (SCI, IF=2.105) (Corresponding Author)

[J.14] Y. Jhong, D. Mikolas, T. Yeh, W. Fang, D. Shaw, J. Chen and C. Fu*, “Characterization of Nonlinear Effects in a Two-Dimensional Dielectric Elastomer Actuator”, Smart Materials and Structures, Vol. 19, No. 10, 2010, pp, 105027. (SCI, IF=2.089) (Corresponding Author).

[J.15] H. Chen and C. Fu*, “Low Voltage Electrowetting Optical Deflector”, Japanese Journal of Applied Physics Vol. 50, 2011, 037202. (SCI. IF=1.058) (Corresponding Author)

[J.16] Y. Chao, Y. Huang, H. Wang, S. Fu, C. Huang, Y. Liang, W. Yang, Y. Huang, G. Chang, H. Zan, H. Meng*, C. Hung*, C. Fu*,“An Organic Hydrogel Film with Micron-Sized Pillar Array for Real-Time and Indicator-free Detection of Zn2+”, Organic Electronics Vol.12, 2011, 1899–1902 (SCI IF=4.047)(Corresponding Author)

[J.17]  C. Lin*, H. Meng, and C. Fu “An Ultrasonic Aerosol Therapy Nebulizer Using Electroformed Palladium-Nickel Alloy Nozzle Plates”, Sensors and Actuators A-Physical, Vol. 169, 2011, 187-193 (SCI IF = 1.8021)(My Ph.D Student is the Corresponding Author)

[J.18] C. Huang, P. Hsiao, F.Tseng, S. Fan, C. Fu, and R. Pan, “Pore-Spanning Lipid Membrane under Indentation by a Probe Tip: A Molecular Dynamics Simulation Study”, Langmuir Vol. 27, 2011, 11930-11942. (SCI IF = 4.186)

[J.19] C. Ke, Y. Lin, Y. Hu, W. Chiang, K. Chen, W. Yang, H. Liu, C. Fu* and H. Sung*, “Multidrug Release Based on Microneedle Arrays Filled with pH-responsive PLGA Hollow Microspheres”, Biomaterials Vol.33, Issue 20, 2012, pp. 5156-5165. (SCI IF = 7.404)(Corresponding Author)

[J.20] T. Chuang, T. Fang, M. Jiang, W. Lei, B. Shew and C. Fu*, “Motion-path-based Three-Dimensional X-ray Free-Form Micromachining System”, Journal of Micromechanics and Microengineering 22, 2012, pp.085027-085037. (SCI IF=2.105)(Corresponding Author)

[J.21] W. Yang, Y. Chen, Y. Huang, Y. Fu, S. Tang and C. Fu*, “Engineering a Biomimetic Villus Array for In Vitro 3-Dimensional Culture of Intestinal Epithelial Cells”, Journal of Microelectromechanical Systems (IEEE/ASME JMEMS), Vol. 21, 2012, No. 6. pp. 1418-1425. (SCI IF=2.098) (Corresponding Author)

[J.22] W. Yang, Y. Huang, B. Shew and C. Fu*, “Study on Diffraction Effect and Microstructure Profile Fabricated by One-step Backside Lithography”, Journal of Micromechanics and Microengineering, Vol. 23, 2013, pp.035004-035016 (SCI IF=2.105)(Corresponding Author)

[J.23] M. Huang, T. Chang, T. Kao and C. Fu* “Metal Deposition on Flexible Membrane through the Combination of Localized Electrochemical Deposition and Electroless Plating”, Accepted by Microsystem Technologies, Vol. 19, 2013, pp. 455-460 (SCI, IF=0.931)

[J.24] Y. Sun, D. Mikolas, E. Chang, P. Lin and C. Fu*, “Lloyd’s Mirror Interferometer Using a Single-Mode Fiber Spatial Filter”, Journal of Vacuum Science and Technology B (JVST B), Vol, 31, 2013, pp.021604, (SCI, IF=1.341)(Corresponding Author)

[J.25] E. Chang, P. Lin, D. Mikolas, T. Schenk, C. Wu, C. Sung and C. Fu*, “Improving Feature Size Uniformity from Interference Lithography Systems with Non-uniform Intensity Profiles”, Nanotechnology 24 (2013) pp.455301 -14(SCI IF=3.979)(Corresponding Author).

[J.26]M. Wu, L. Chu, P. Hsiao, Y. Lin, C. Chia, T. Liu, C. Fu*, and A. Chiang*, “Optogenetic Control of Selective Neural Activity in Multiple Freely Moving Drosophila Adults”, Proc. Natl. Acad. Sci. U.S.A. 111, 5367-5372 (2014) (SCI IF=9.737)(Corresponding Author).

 [J.27] E. Chang, M. Stach, C. Yang, C. Fu and C. Lo*, “Enlarging a post-lithography pattern modification process window with a Poisson’s ratio-matching inter-layer”, Microelectronic Engineering,127 (2014), pp. 97-101. (SCI, IF=1.224)

 [J.28] T. Lin, T. Huang, Y. Yang, K. Tseng, and C. Fu*, “Throughput comparison of multiexposure and multibeam laser interference lithography on nanopatterned sapphire substrate process” Japanese Journal of Applied Physics, Volume 53, Issue 6S, 2014. (SCI, IF=1.067) (Corresponding Author) .

[J.29] P. Chen, P. Lin, D. Mikolas, Y. Tsai, Y. Wang, C. Fu* and S. Chang “Bulk vertical micromachining of single-crystal sapphire using inductively coupled plasma etching for x-ray resonant cavities”, Journal of Micromechanics and Microengineering, 25 (2015) 015016 (9pp) (SCI IF=2.105)(Corresponding Author)

[J.30] Y. Lin, M. Wu, P. Hsiao, L. Chu, M. Yang, C. Fu* and A. Chiang*, “Three wavelength light control of freely moving Drosophila Melanogaster for less perturbation and efficient social-behavioral studies”, Biomedical Optics Express 2015 13;6(2):514-23. (SCI IF=3.497)(Corresponding Author)

[J.31] E. Chang, Y. Hsu, C. Fu, Y. Wang, C. Cheng and C. Chen* “Nanopost-guided Self-organization of Dendritic Inorganic Salt Structures”, Langmuir, 30(36),(2014) pp. 10940-10949 (SCI IF=4.384).

 

International Conference Papers

[C.1]C. Fu*, T. Koller, R. Ahrens, Z. Rummler and W. K. Schomburg, “Optimization of Chamber Adhesive Bonding for Packaging of Micro Components.” Eurosensors XVI, Prague, 2002.

[C.2]C. Fu*, Z. Rummler and W. K. Schomburg, “Magnetic Driving Micro Ball Valve Fabricated by Multilayer Adhesive Film Bonding”, Micro mechanics Europe Workshop 2002, in Romania.

[C.3]C. Fu*, H. Huang, “Novel Methods for the Fabrication of SU-8 UV-LIGA Mold with Tapered Demolding Angles”, Proc. of Harmst 2005, pp. 116-117 (Gyeongju, Korea)

[C.4]H. Huang, C. Fu*, “Out-of-plane Polymer Hollow Micro-needle Array Integrated On a Microfluidic Chip”, Proc. of IEEE Sensors, 2005, pp.484-487 (Irvine, USA) (EI)

[C.5]C. Lu, J. Yang, C. Huang, H. Chiang, C. Fu, C. Cheng, and C. Chen,”Active CPU Cooling System with Piezoelectric Actuated Droplet Generator”, MRS, Boston, 2005.

[C.6]C. Fu*, C. Hung, H. Huang, “A Novel and Simple Fabrication Method of Embedded SU-8 Micro Channels by Direct UV Lithography”, IMEMS in Singapore 2006 (Oral presentation)

[C.7]H. Huang, C. Fu*, “Out-of-plane Polymer Hollow Micro-needle Array Integrated on a Flexible Membrane”, Proc. of ISNMT-2, 2006, pp. 305-309. (Hsinchu, Taiwan)(Oral presentation)

[C.8]C. Fu*, C. Hung, H. Huang, “A Novel and Simple Fabrication Method of Embedded SU-8 Micro Channels by Direct UV Lithography”, Proc. of ISNMT-2, 2006, pp. 250-253. (Hsinchu Taiwan)(Oral presentation)

[C.9]S. Chiu, H. Huang, C. Y. Chuang, C. Fu*, “A Novel Framework of Making PLA/PLGA Polymer Micro Needles Patch for Better Skin Piercing and Drug Release”, Proc. of uTas, 2006, pp. 1531-1533. (Tokyo, Japan)

[C.10]K. Chuang, L. Chu, M. Jiang, T. Chuang, C. Fu, and S. Fan*, “Selective Particle Separation and Deposition by 3-D Insulator Based Dielectrophoresis”, Proc. of uTas 2006, pp. 398-400. (Tokyo, Japan)

[C.11]H. Chen and C. Fu, “Photoresist Mask for Quartz RIE in Microfluidic Channel”, 12th Microoptics Conference (MOC), in Seoul, Korea, September 11-14, 2006.

[C.12]H. Chen, C. Yen, Y. Li, W. Tyan and C. Fu, “Liquid Scanner”, International Microsystems, Packing, Assembly Conference(IMPACT), in Taipei ,Taiwan, October 18-20, 2006 (Oral presentation).

[C.13]C. Lu, J. Yang, C. Fu, ”Traveling Wave Driven Micro-Dispenser for CPU Cooling Application”, IEEE International Ultrasonics Symposium, 2006, in Canada (Oral presentation)

[C.14]H. Huang, T. Wang and C. Fu*, „3D High Aspect Ratio Micro Structures Fabricated by One Step UV Lithography”, Proc. of IEEE NEMS, 2007, pp.571-574 (Bangkok Thailand) (EI)

[C.15] B. Shew, S. Wei, Y. Tsai, Y. Cheng, C. Fu, ”Nanoparticle-Amplified Optical Interferometer Biosensor toward Single Molecular Detection”, Proc. of IEEE NEMS, 2007, pp.127-130  (Bangkok, Thailand) (Oral Presentation) (EI)

[C.16]H. Huang, C. Fu*, “A Novel Fabrication Method of 3D Metallic Needles Array on Flexible  Substrate for Neural Probing”, Proc. of IEEE MEMS 2007, pp. 295-300 (Kobe Japan) (EI)

[C.17]Y. Jhong, C. Huang, C. Hsieh and C. Fu*, “Improvement of viscoelastic effects of dielectric elastomer actuator and its application for valve devices”, SPIE Volume 6524, pp. 65241(EI)

[C.18]C. Fu*, H. Huang, W. Yang, T. Wang, C. Chuang, S. Yeh, and B. Shew “Recent Developments of Back Side Exposure Technology for the Fabrication of Micro Electrodes/Needles Array on Flexible Membranes”, HAMRST 2007. (Oral presentation)

[C.19]M. Huang and C. Fu*, “Fabrication of Herringbone-Grooved Cylindrical Journal Bearings by Soft Lithography”, APCOT 2008.

[C.20]M. Huang and C. Fu*, “Adapting Conventional Planar Micro Fabrication Tools for the Fabrication of Roller Imprinting Molds”, APCOT 2008.

[C.21]M. Huang and C. Fu*, “Fabrication of Anti-Reflection Films by ICP-RIE”, APCOT 2008.

[C.22]C. Huang1, P. Hsiao* and C. Fu., “Stability of a Lipid Bilayer Suspended on a Nano Hole”, Conference on Computational Physics 2009, Dec 15~19.

[C.22]C. F. Lu, W. C. Liu, C. J. Chen and C. Fu*, “Anti-wetting Trench of Nozzle Plate for Piezoelectric Actuating Dispenser”, Proc. of IEEE IMPACT 2009, pp. 674-677 (Taipei Taiwan)

[C.23] T. Chuang, M. Jiang, B. Shew, W. Lei, C. Fu*, “Swelling Phenomena of PMMA with X-ray Lithography”, HARMST 2009, Saskatoon, Canada.

[C.24] C. Yang, P. Lin and C. Fu*, “A Novel Lloyd Mirror Type Laser Interference Lithography Framework for the Fabrication of Large Area Periodical Nano Structures”, HARMST 2009, Saskatoon, Canada.

[C.25] C. Lin and C. Fu* “A Novel Fabrication Method of High Aspect Ratio Nebulizer Nozzle Plates Used in the Inhalation Drug-Feeding Systems”, HARMST 2009, Saskatoon, Canada.

[C.26] P. Tseng, T. Shih, C. Tien, Y. Chen, and C. Fu* “Photo Thermal Based Nonablative Dermal Remodeling Device”, Proc. of uTas, 2009. Korea.

[C.27] C. Lin, H. Meng and C. Fu, “An Electroformed Palladium-Nickel Alloy Nozzle Plate for

      Nebulizers”, HARMST 2011, Taiwan, pp.130-131.

[C.28]P. Chen, D. Mikolas, P. Lin, Y. Tsai, Y. Sun and C. Fu*, “X-ray resonant cavities produced by 100 micron deep etching of single crystal sapphire by ICP”, HARMST 2011, Taiwan. pp. 160-161.

[C.29] M. Huang and C. Fu*, “Patterns of the Large Area Microfabrication by Localized Electrochemical

      Deposition and Electroless Plating”, HARMST 2011, Taiwan. pp. 168-169.

[C.30]H. Chen and C. Fu*, “Annealing Effect of Tantalum Pentoxide for Low Voltage Electrowetting on Dielectric (EWOD)”, HARMST 2011, Taiwan. pp. 170-171.

[C.31] C. Lu, C. Chen and C. Fu*, “Wide Spraying Angle Droplet Ejector with PZT Actuated Nozzle Plate”, HARMST 2011, pp.186-187.

[C.32] C. Yang, Y. Sun, P. Lin, D. Mikolas, C. Sung and C. Fu*, “A Novel Lloyd Mirror Type Laser Interference Lithography Framework for the Fabrication of Large Area Periodical Nano Structures”, MNE 2011, Berlin.

[C.33] T. Huang and C. Fu*, “Two Steps Controlled Released Microneedle Patch Used for Hyperpigmentation”, Biomedical Engineering International Conference (BME), 2012, Hong-Kong.

[C.34] Y. Sun, D. Mikolas, E. Chang, P. Lin and C. Fu*,“Lloyd’s Mirror LIL System Using UV Single Mode Fiber for Grating and Photonic Crystal Patterning” , IEEE Sensors 2012, Late News, Taiwan.

[C.35] E. Chang, D. Mikolas, Y. Sun, P. Lin and C. Fu*,“Lloyd’s Mirror Interferometer Using a Single-Mode Fiber Spatial Filter”, MNC 2012, Kobe. Japan.

[C.36]T. Huang and C. Fu*, “Localized Two Steps Controlled Released Microneedle Patch Used for Hyperpigmentation”, Accepted by IEEE NEMS Conference, 2013, Suzhou. China.

[C.37] E. Chang, P. Lin, D. Mikolas, C. Wu, C. Sung and C. Fu*, “Line Width and Uniformity Management of Silicon NIL Molds using Lloyds Mirror LIL and ICP Etching”, Submitted to International Conference on Electron, Ion and Photon Beam Technology and Nano Technology, 2013, (EIPBN 2013), Nashville, Tennessee, USA. 

[C.38] E. Chang, P. Lin, D. Mikolas, C. Wu, C. Sung and C. Fu*, “Line Width and Uniformity Management of Silicon NIL Molds using Lloyds Mirror LIL and ICP Etching”, accepted by HARMNST 2013, Berlin, Germany.

[C.39] “Localized Two Steps Controlled Released Microneedle Patch Used for Hyperpigmentation”, accepted by HARMNST 2013, Berlin, Germany.

[C.40] T. Lin, T. Huang, Y. Yang and C. Fu*, “Throughput comparison of multi-exposure and multi-beam laser interference lithography on nano patterned sapphire substrate process” accepted by 26th International Microprocesses and Nanotechnology Conference, 2013, (MNC 2013), Sapporo,  Hakkaido, Japan.

[C.41] T. Lin, T. Huang, Y. Yang, K. Tseng and C. Fu*, “Throughput comparison of multi-exposure and multi-beam laser interference lithography on nano patterned sapphire substrate process” accepted by The IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS), 2014, (NEMS 2014), Hawaii, USA.

[C.42] K. Tseng, T. Lin, N. Modsching, W. Fang and C. Fu*, “Polymer Material Grating Used on Contactless Sub-Wavelength MEMS Physical Sensors” The IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS), 2014, (NEMS 2014), Hawaii, USA.(Oral presentation)

[C.43] K. Tseng, S. Hong, T. Lin and C. Fu*, “Design and Analysis of the Polymer Material Wire-Grid Polarizer Structure Used on Optical Contactless MEMS Accelerometer”, MNE Conference, 2014, Lausanne. Switzerland.

 

Patents

已核准並取得證書的專利

[P.1] “熱脈衝式微流量計”, 傅建中, 李正國, 吳清沂, 林敏雄, 中華民國專利00384391, 2000-2018.

[P.2] “新穎熱脈衝式微流量計之架構” 傅建中, 李正國, 吳清沂, 林敏雄, 中華民國專利00384392, 2000-2018.

[P.3] Fu, C., Lee, C., Wu, C. “Thermal Pulsed Micro Flow Sensor”, US Patent No. 6,289,746, 2001-2021.

[P.4] “利用背面曝光之LIGA模具之製造方法”, 傅建中, 黃恆基, 中華民國專I288116, 2007-2025

[P.5] “內嵌式微型通道之形成方法”, 傅建中, 洪嘉鴻, 中華民國專利 I288117, 2007-2026

[P.6] “高分子材料與晶片之局部接合結構”, 溫榮宏, 傅建中, 中華民國專利I293485, 2008-2025.

[P.7] “一種多功能奈米探針介面結構及製作方法”, 蘇煥傑, 陳思 陳新, 張兗君, 方維倫, 傅建中, 游萃蓉, 中華民國專利 I317016, 2009-2026.

[P.8] “三維高深寬比之微結構之形成方法”, 傅建中, 黃恆基, 中華民國專I315715, 2009-2025

[P.9] “中空微針結構之製造方法”, 傅建中, 黃恆基, 中華民國專利 I300055, 2008-2025.

[P.10] “利用生物分解回收料製作開孔發泡之方法”, 吳易凡, 傅建中, 中華民國專利 I346685, 2011-2026

[P.11] “自我分離層之製造方法”, 傅建中, 郭浩中, 陳政寰, 中華民國專利 I360236, 2012-2027.

[P.12] Fu, C., and Huang, H.,” Method of Manufacturing a LIGA Mold by Backside Exposure”, Patent US 7384729, 2008-2028.

[P.13] Fu, C., and Huang, H.,” Method of Manufacturing Hollow Micro-needle Structures”, Patent US7906273, 2011-2031.

[P.14] Fu, C., and Huang, H., “Method of Forming 3D Micro Structures with High Aspect Ratios”, Patent US 7947430, 2011-2031.    

[P.15] “以光纖作為空間濾波器與擴束器之雷射干涉微影設備”, 傅建中, 孫宜嶙, 麥達維, 林寶德, 張恩獎, 黃則斌, 中華民國專利 I484307, 2015-2032.

 

已提出申請的專利

[P.16] Fu, C., Chang, S., and  Chiang, A., “Confocal Microscopy System with revolvable stage”, US Patent Taiwan, US, China application No. 07P032 (in application).

[P.17] Fu, C., Chang, S., and  Chiang, A., “Sample carrying apparatus capable of revolving samples”, Patent Taiwan, US, China application No. 07P033 (in application).

[P.18] Fu, C., Chen, C., and Kuo, H., “Light Source with Reflective Nano Structures”, Patent Taiwan, US, China application No. 07P130 (in application).

[P.19] Fu, C., Chen, C., and Kuo, H., “Manufacturing Method of Self Separation Layer”, Patent Taiwan, US, China application No. 07P131 (in application).

[P.20] H. Su, H. Chen, H. Chen, Y. Chang, S. Yeh, W. Fang, C. Fu, S. Lu and T. Yew, “Multifunctional Nano Probe Interface Structure for Neural Prostheses and Manufacturing Method Thereof.”, Patent US, application no. 11/775878 (in application).

[P.21] Tseng. P, Shih. T, Tien. C, Chen. Y, and Fu. C, “Photo Thermal Based Nonablative Dermal Remodeling Device”, Patent Taiwan, US, China application No. 08P047 (in application).

[P.22] Fu, C., Yang, and C, “A Novel Lloyd Mirror Type Laser Interference Lithography Framework for the Fabrication of Large Area Periodical Nano Structures”, Patent Taiwan, US, China application No. 09P071 (in application).

[P.23] Fu, C., P. Lin, Chang, E. and T. Huang, “Lloyd’s Mirror Interferometer Using a Single-Mode Fiber Spatial Filter”, Patent Taiwan, US, China application No. 101139863 (in application).

[P.24] C. Fu, Y. Sun, D. MIKOLAS, P. Lin, E. Chang and T. Huang, “LASER INTERFERENCE LITHOGRAPHY APPARATUS USING FIBER AS SPATIAL FILTER AND BEAM EXPANDER”, Patent Taiwan, US, China application No. 13/800,072 (in application).

 

Local Conference Papers

[L.1] 劉振凰, 徐慎行, 黃蘊慈, 黃祖緯, 范士岡, 傅建中, 曾繁根, 潘榮隆, “活體單分子膜蛋白H+-PPase之奈米尺度操控、分子間作用力量測、及動態生理特性分析”, 第十屆奈米工程暨微系統技術研討會。(Oral Presentation)

[L.2] 魏紹倫、許博淵、鄭逸群、蔡元浩、傅建中, “奈米金粒子增強光干涉式生物感測技術”, 第十屆奈米工程暨微系統技術研討會。

[L.3] 莊子漢、許博淵、雷衛台、傅建中*,“Fabrication of 3D PMMA Microstructures Using BL19A with a Multi-axis 3D X-ray Machining System”, NSRRC Annual User Meeting 2006.

[L.4] 江茂萱、莊子漢、許博淵、傅建中*, “Fabrication of Micro Cavities on PMMA Film Using BL18B for 3-D iDEP Applications”, NSRRC Annual User Meeting 2006.

[L.5] 曾志峰、許博淵、雷衛台、傅建中, ”The Research On Fabricating Micro-Structure Using X-Ray Lithography With Mask Rotating Method”, NSRRC Annual User Meeting 2006.

[L.6] 黃恆赍、王騰輝、傅建中, “3D High Aspect Ratio Micro Structures Fabricated by One Step UV Lithography”, NSRRC Annual User Meeting 2006.

[L.7] 洪嘉鴻、黃恆赍、傅建中, “A Novel and Simple Fabrication Method of Embedded SU-8 Micro Channels by Direct UV Lithography”, NSRRC Annual User Meeting 2006.

[L.8] 黃恆赍、王騰輝、傅建中, “A Novel Fabrication Method of Flexible Micro Electrode Array for Neural Recording”, NSRRC Annual User Meeting 2006. 

[L.9] E. Chang, Y. Sun, P. Lin, D. Mikolas, K. Tseng, T. Lin, Y. Yang and C. Fu,“Lloyd’s Mirror Interference Lithography Using a Single Mode Fiber Spatial Filter”, 第十七屆奈米工程暨微系統技術研討會, 2013。(Oral Presentation)

[L.10] 傅建中, 林德勛, 黃則斌, 楊音光, “多次曝光和多道光系統之雷射干涉微影在圖案化藍寶石基板產能比較“, 第16屆全國機構與機器設計學術研討會, 2013。(Oral Presentation)

 

Other

[O.1] “深擴散爐管熱流場模擬與製程穩定性之研究”新竹科學園區管理局與中美矽晶製品有限公司計畫報告書。

[O.2]尖端奈米技術科普化教材 (LIGA Process), 國科會科教處出版。

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