[中文版]    
 
 
 
Metallurgy Microscope
The metallurgy microscope is used to observe the EP structure detailed geometry and its trace distributions. The amplification factor is 50x to 1000x.
 
Grinder/Polisher
In order to observe EP chip, the grinder/polisher is used to grin the chip surface, and then the chip is observed by microscopes.
 
Ultrasonic Cleaner
This cleaner is used to clean dirt on chip surface.

 
Precise Balance
The precise balance is used to measure the chip's weight. The resolution is up to 0.1 micro-gram
 
Bending Strength Testing Instrument
The instrument is used to measure bending strength of specimens with thin films. According to different clipping designs, the instrument can perform the measured tests of 3PBT and 4PBT. In addition, the interfacial cracking energy of dissimilar stacked thin films can be also implemented by this framework.
 
Heating Oven

This equipment is to simulate the solder reflow process or to test thermal reliability of chips.

 
Hot Plate
This equipment is used to heat the experimental specimens.
 
Microscope

This microscope is used to observe large chips, and it's amplification factor is 3x to 18x.

 
Optical Microscope
Observation Scale:
The optical microscope has lens of 1x to 7x amplification factor, the TV tube itself could provide 1x to 2x amplification factor, and the CCD camera would enlarge image for 43x. As a summary, this optical microscope has total amplification factor of:
0.75 x 1 x 1 x 43 = 32x (Minimum)
0.75 x 7 x 2 x 43 = 450x (Maximum)
 
Diamond Cutter

The diamond cutter is used to cut the whole chip to observe the inner structure of the chip.

 
ANSYS (Computational Solid Mechanics Software)

ANSYS® is the most widespread calculational solid mechanics FEM software in industrial field. It could simulate stress-strain analysis on various 3D elements, like beam elements, shell elements, plate elements, and so on. Moreover, it could be applied to calculate on temperature field, fluidic field, or electromagnetic field.

 
Surfer11
Surfer software is suitable for the drawing of a 3D space through the analytic data.
 
Optical Table
To prevent the vibration disturbance of testing enviroments on devices installed on table by using a pneumatic isolator.

Specifications:
Table size: 100cm*180cm
Pitch of mounting hole: 25mm

 
Push-Pull Testing Machine
The DAGE 4000 Plus tester can do different testing such as tensile strength of solder bonding, shear damage or fatigue testing by corresponding testing module. The different testing modules have different load of range which is up to 500 kg of shear test, 100 kg of tension test, and 50 kg of thrust test.
 
 
 
 

Copyright ©2017 NTHU Microsystems Mechanical Design & Reliability Analysis Laboratory ALL RIGHTS RESERVED

國立清華大學動力機械工程學系 微系統力學設計與可靠度分析實驗室 版權所有