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Personal vehicles have shifted from fuel to hybrid/electric power in pursuit of reduced carbon emission due to the increasing awareness of environmental protection. Power modules have become a crucial component of modern-day electric vehicles (EVs) considering the increasing demand for high power and voltage output. However, the direct bonded copper substrate in the traditional power module still has warpage issues after the manufacturing process. This phenomenon leads to poor heat dissipation after assembly with heat sink due to high switching speed with large heat generation rates within the components, which eventually fails to meet the requirements of modern-day EVs. Additionally, mechanical and thermal issues will affect the reliability of power modules. Therefore, establishing a process-oriented simulation methodology, which considered the coupling effect of thermal and electrical responses to improve the mechanical behavior, and optimizing the reliability of the IGBT high-power module, are crucial topics in the current research.

Fig.1 Fabrication, wafer level assembly, simulated analysis of ultra thin chip of 3D ICs.

Fig.2 Finite element model and simulation of advanced packaging architecture.

 

Packaging technology has gradually developed toward minimized dimension, high I/O count, and multi-chip integrated architecture. Fan-out panel-level packaging (FOPLP) has currently become the most popular packaging technology because it has the highest potential to overcome the previously mentioned difficulties. However, several concerned mechanical characteristics, such as the coefficient of thermal extension mismatch induced from heterogeneous integration and heat and chemical reactions of the molding compound, would result in serious warpage issues during the manufacturing process of FOPLP. Such issues would eventually lead to packaging reliability deterioration. Thus, the macroscopic and microscopic physical behaviors of material models used in the simulated analysis should be carefully considered to resolve the significant dimension mismatch within the components of actual FOPLP vehicles. Investigations on advanced packaging techniques based on the summary of the aforementioned challenges would be the next considerable leap among the research topic of mechanical engineering.

Fig.3 Power module with insulated metal substrate (IMS).

Fig.4 Finite element model & equivalent plastic strain distribution of IMS module under PCT.

 

Along with the innovated film materials, flexible electronics has rapidly grown among wearable devices with the advantages of light weight, minimized thickness, and applicability on various shapes and sizes. The specific feature of flexible and foldable electronics lies in the capability to withstand repeated loadings under a few millimeters of bending radius. The soft device has various applications, such as wearable device, curved display, flexible solar cell, and printed electronics. Additionally, the most crucial part of flexible display includes flexible glass, metal foils, and polymer films. Particularly, flexible glass has outstanding optical applications and low thermal extension coefficient and could be adopted as a barrier to prevent vapor and air from entering the package. However, flexible glass also has the disadvantages of fragility, increased production cost, and high restrictions on applied bending radius. Therefore, the locations of multiple neutral axes should be seriously considered to prevent the flexible glass from fracture. The number and positions of the neutral axes can be appropriately configured with the mechanical model and analytic results presented in this research. This configuration is expected to be an important design reference for the next-generation soft electronic architectures.

Fig.5 Actual measurement platform utilized in the mechanical loading tests of flexible hybrid electronics (FHE).

Fig.6 The screen of OLED flexible display appears multi-dark lines induced by testing apparatus with thousands bending performance. Also, strain distribution of flexible display is derived based on the schematic drawing.

 

The dimension of semiconductors has shifted from micron to nanometer scale due to the rising demand for high performance on electronic devices. However, the conventional method of shrinking the device by decreasing the characteristic dimension (length and width) of the actual device has led to some bottlenecks in manufacturing. An alternative way is to utilize the advantages of 3D structures, including FinFET and gate-all-around FET, to improve the controllability and performance of the semiconductor device. Additionally, process-induced performance enhancements, such as gate-last, high-k metal gate novel semiconducting materials (SiGe, Ge, and III-V), and strain engineering, can boost the overall performance of the device. In the evolution of semiconductor architecture, the technology node is used as a description of the generation for the semiconductor device, while the 22 nm technology node was regarded as the final chapter of the planar device. Novel techniques in 7 nm FinFET and 3 nm GAA-FET have been observed to be candidates due to improved electrical performance. Thus, the possibility of strain engineering to obtain further boost is regarded as a novel topic in the semiconductor industry.

Fig.7 Mechanism of induced lattice mismatch stress within 2D MOSFETs and the schematic diagrams of preferred stress components in N/P MOSFETs.

Fig.8 Process-oriented device simulation considered in advanced 3D MOSFETS.

 

For the next generation of integrated circuits, the copper/low-k interconnect system has the advantage of reducing RC delay between adjacent lines and connections, thereby minimizing the energy consumption. Therefore, this system is regarded as the best solution to interconnect materials for current advanced chips. Along with the decreasing dimension from micron to nanometer scale, the emerging difficulties in reliability and failure mechanisms with the reduction of interconnection width and the geometry variation in the circuit must be urgently studied. The major issues of electromigration (EM) will lead to void growth inside the copper line. Moreover, the interconnect comprising different materials suffers from a mismatch considering the thermal expansion coefficient, which drives the vacancy from grain boundaries to via area due to stress gradient. This phenomenon eventually causes component failure, which is also known as the stress migration (SM) effect. By contrast, reliability problems regarding interfacial fractures in bonded interfaces between low-k materials and barrier layers should be carefully considered with the application of external load or process-induced stress. Therefore, the current research focuses on the reliability physics and failure mechanism as well as the impacts of scaling sizes and geometry variations for interconnects. Moreover, the next-generation interconnect system, including novel processes and new materials, will be comprehensively explored and discussed.

Fig.9 Simulation investigation of nano-scaled interconnect reliability by using Atomic Flux Divergence (AFD) based approach.

Fig.10 A new stress migration failure mode in highly scaled Cu/Low-k interconnects.

 
 
 
 

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